CMOS-compatible, athermal silicon ring modulators clad with titanium dioxide
نویسندگان
چکیده
منابع مشابه
CMOS-compatible, athermal silicon ring modulators clad with titanium dioxide.
We present the design, fabrication and characterization of athermal nano-photonic silicon ring modulators. The athermalization method employs compensation of the silicon core thermo-optic contribution with that from the amorphous titanium dioxide (a-TiO(2)) overcladding with a negative thermo-optic coefficient. We developed a new CMOS-compatible fabrication process involving low temperature RF ...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2013
ISSN: 1094-4087
DOI: 10.1364/oe.21.013958